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Bộ đo và điều chỉnh lưu lượng khí ga – 4800 Brooks Việt Nam
Bộ đo và điều chỉnh lưu lượng khí ga
4850 Brook Việt nam
4860 Brooks instrument Việt Nam
4800 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters Việt Nam
Features
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Flow response time (settling time) <0.75 seconds
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Innovative MEMS sensor and proprietary PID algorithm
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Compact size is less than half the size of typical thermal MFCs: 1” x 3” x 4” (25 mm x 76 mm x 101 mm)
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Optional Local Operator Interface (LOI) simplifies set-up and operation; free LabVIEW VI download for monitoring and zeroing the device
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Digital capability via RS-232
Benefits
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Well suited for wide range of common, non-corrosive gases
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Fast response time ensures rapid steps during process recipe changes
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Excellent for OEMs: Compact size eases integration into tight machine spaces and speeds installation
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Optional Local Operator Interface (LOI) is a turnkey solution for local indication, set point control and device configuration; eliminates need for remote secondary electronics
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Variety of communication options makes it easy to align with user requirements
Applications
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Heat treating, cutting/welding and other thermal processes
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Solar/thin film physical vapor deposition (PVD) systems
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Analytical devices to measure and control reagent, calibration and sample gas flow
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4850
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4860
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Product Type
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Mass Flow Controller
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Mass Flow Meter
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Flow Range (Full Scale Capacity)
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50 sccm – 40 slpm
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50 sccm – 40 slpm
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Accuracy
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3.0% F.S.
1.0% F.S. (optional)
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3.0% F.S.
1.0% F.S. (optional)
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Repeatability
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0.15% F.S.
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0.15% F.S.
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Response Time
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Normally Closed Valve: 300 ms – <1 sec
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Normally Closed Valve: 300 ms – <1 sec
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Max Pressure
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150 psig/10 barg
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150 psig/10 barg
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Diagnostic Capability
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Status Lights: MFC Health, Network Status
Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic/Service Port: RS485 via 2.5 mm jack
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Status Lights: MFC Health, Network Status
Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic/Service Port: RS485 via 2.5 mm jack
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Analog Communication
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0-5 Vdc
4-20 mA |
0-5 Vdc
4-20 mA |
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Digital Communication
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RS232
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RS232
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