Thiết bị đo và điều khiển lưu lượng khí ga – GF40 Brooks Vietnam

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Thiết bị đo và điều khiển lưu lượng khí ga GF40 Brooks Vietnam
Thiết bị đo và điều khiển lưu lượng khí ga GF40 
GF40 Brook Việt nam
GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters
BROOK INSTRUMENT VIỆT NAM
 
Features
  • Programmable multi-gas/multi-range capabilities
  • Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
  • Sub-1 second flow response time and accuracy of 1% set point for demanding applications
  • Well suited for a variety of gases
  • Fast response, Hastelloy sensor
  • Easily accessible diagnostic service port is independent of tool communication
  • Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
 
Benefits
  • MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
  • MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
  • OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
  • Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
  • Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
  • User-accessible service port simplifies troubleshooting and diagnostic tasks
  • Variety of elastomer seals provide cost performance flexibility across range of applications
  • Multi-protocol communication interface supports integration into existing systems
Applications
  • Solar cell chemical vapor deposition systems
  • Life sciences bioreactors
  • Vacuum processes
  • Nanotechnology/MEMS fabrication
  • Plasma, glass and web coating systems
  • Excellent option for manifold/gas delivery systems
GF40
Flow Range (Full Scale Capacity)
3 sccm – 50 slm
Accuracy
1% S.P. 35-100%
0.35% F.S. 2-35%
Max Pressure
150 psig/10 bar
Repeatability
<0.20% S.P.
Multi-Gas & Range Configurability
MultiFlo™ Available
Diagnostic Capability
Status Lights: MFC Health, Network Status
Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic/Service Port: RS485 via 2.5 mm jack
Analog Communication
 0-5 V,  0-10 V, 0-20 mA, 4-20 mA
Digital Communication
DeviceNet™
EtherCAT™
Profibus®
RS485
Filename
File Type
Documents By Language
Data Sheet
pdf
English German Japanese
Installation & Operation Manual
pdf
English Japanese
DeviceNet™ Supplemental Manual – GF40, GF80
pdf
English
EtherCAT® Supplemental Manual – GF40, GF80
pdf
English
Profibus® Supplemental Manual – GF40, GF80
pdf
English
RS485 A-Protocol Supplemental Manual – GF40, GF80
pdf
English
RS485 L-Protocol Supplemental Manual – GF40, GF80
pdf
English
RS485 S-Protocol Supplemental Manual – GF40, GF80
pdf
English
CE EU Declaration of Conformity Certificate
pdf
English
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Thiết bị đo và điều khiển lưu lượng khí ga – GF40 Brooks Vietnam

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  • Thiết bị đo và điều khiển lưu lượng khí ga GF40 Brooks Vietnam
  • Thiet bi do va dieu khien luu luong khi GF40 Brooks Vietnam
  • GF40 Brooks Vietnam
  • GF80 Brooks Việt Nam
  • GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters Việt nam
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