Chi tiết sản phẩm
Thiết bị đo và điều khiển lưu lượng khí ga GF40 Brooks Vietnam
Thiết bị đo và điều khiển lưu lượng khí ga GF40
GF40 Brook Việt nam
GF40 Series Elastomer Sealed Thermal Mass Flow Controllers & Meters
BROOK INSTRUMENT VIỆT NAM
Features
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Programmable multi-gas/multi-range capabilities
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Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
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Sub-1 second flow response time and accuracy of 1% set point for demanding applications
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Well suited for a variety of gases
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Fast response, Hastelloy sensor
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Easily accessible diagnostic service port is independent of tool communication
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Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
Benefits
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MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
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MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
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OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
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Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
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Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
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User-accessible service port simplifies troubleshooting and diagnostic tasks
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Variety of elastomer seals provide cost performance flexibility across range of applications
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Multi-protocol communication interface supports integration into existing systems
Applications
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Solar cell chemical vapor deposition systems
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Life sciences bioreactors
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Vacuum processes
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Nanotechnology/MEMS fabrication
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Plasma, glass and web coating systems
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Excellent option for manifold/gas delivery systems
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GF40
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Flow Range (Full Scale Capacity)
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3 sccm – 50 slm
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Accuracy
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1% S.P. 35-100%
0.35% F.S. 2-35%
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Max Pressure
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150 psig/10 bar
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Repeatability
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<0.20% S.P.
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Multi-Gas & Range Configurability
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MultiFlo™ Available
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Diagnostic Capability
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Status Lights: MFC Health, Network Status
Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic/Service Port: RS485 via 2.5 mm jack
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Analog Communication
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0-5 V, 0-10 V, 0-20 mA, 4-20 mA
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Digital Communication
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DeviceNet™
EtherCAT™
Profibus®
RS485
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Filename
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File Type
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Documents By Language
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|---|---|---|
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Data Sheet
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pdf
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English German Japanese
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Installation & Operation Manual
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pdf
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English Japanese
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DeviceNet™ Supplemental Manual – GF40, GF80
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pdf
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English
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EtherCAT® Supplemental Manual – GF40, GF80
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pdf
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English
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Profibus® Supplemental Manual – GF40, GF80
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pdf
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English
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RS485 A-Protocol Supplemental Manual – GF40, GF80
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pdf
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English
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RS485 L-Protocol Supplemental Manual – GF40, GF80
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pdf
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English
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RS485 S-Protocol Supplemental Manual – GF40, GF80
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pdf
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English
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CE EU Declaration of Conformity Certificate
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pdf
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English
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